Titanium and Titanium alloy Sputtering Target
Name: PVD sputtering titanium target
Density: 4.51g/cm3
Standard: ASTM B348,ASTM B381,ASTM B265,ASTM B338,ASTM F67,ASTM F136
Grade: Titanium (Gr1, Gr2, Gr5, Gr7,GR12)
Alloy target: Ti-Al, Ti-Cr, Ti-Zr etc
Surface: polished, machining surface
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Sizes:
Dia20--2000mm, thickness 3.0mm--300mm;
Length:50-2000mm Width:100-1000mm
Types: Round target, Plate Target, Tube target, Flat Target, Customized is available
Purity: 99.5%,99.95%, 99.98% 99.99%
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Technique:
Vacuum Melting, Patented thermo-mechanical process
Application:
Semiconductor separation, Film coating materials, Storage Electrode coating, Sputtering coating, Surface coating, Glass coating industry, vacuum coating decoration
Feature:
1.High Hard texture
2.Low impurity content
3.Better heat dissipation
4.High Tensile strength
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Chemical composition
|
|
|
N
|
C
|
H
|
Fe
|
O
|
Al
|
V
|
Pd
|
Mo
|
Ni
|
Gr 1
|
0.03
|
0.08
|
0.015
|
0.20
|
0.18
|
/
|
/
|
/
|
/
|
/
|
Gr 2
|
0.03
|
0.08
|
0.015
|
0.30
|
0.25
|
/
|
/
|
/
|
/
|
/
|
Gr 3
|
0.05
|
0.08
|
0.015
|
0.30
|
0.35
|
/
|
/
|
/
|
/
|
/
|
Gr 5
|
0.05
|
0.08
|
0.015
|
0.40
|
0.20
|
5.5~6.75
|
3.5~4.5
|
/
|
/
|
/
|
Gr 7
|
0.03
|
0.08
|
0.015
|
0.30
|
0.25
|
/
|
/
|
0.12~0.25
|
/
|
/
|
Gr 9
|
0.03
|
0.08
|
0.015
|
0.25
|
0.15
|
2.5~3.5
|
2.0~3.0
|
/
|
/
|
/
|
Gr12
|
0.03
|
0.08
|
0.015
|
0.30
|
0.25
|
/
|
/
|
/
|
0.2~0.4
|
0.6~0.9
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Grade
|
Tensile strength Rm/MPa(>=)
|
Yield strength Rp0.2(MPa)
|
Elongation A4D(%)
|
Reduction of area Z(%)
|
Gr1
|
240
|
140
|
24
|
30
|
Gr2
|
400
|
275
|
20
|
30
|
Gr5
|
895
|
825
|
10
|
25
|
Gr7
|
370
|
250
|
20
|
25
|
Gr12
|
485
|
345
|
18
|
25
|
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Titanium Target is the surface of the oxide film is equivalent to a good long-term wear-resistant release agent, the use of titanium plate to save the separation agent, so that easy to peel off the plate, eliminating the pre-treatment process, The board is lighter than the copper plate.
Package Terms:
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Moisture-proof cloth, foam cotton inside, wooden case outside.
Shipping Terms:
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1.For the sample order: By international express such as: DHL, TNT, EMS, UPS and so on.
2. For large quantity: By air or sea transport.
Email: jasontitanium@163.com
Whatsapp/Skype/Wechat/Line: +86-15829508781